As a high-tech industry, the semiconductor industry is often misunderstood as a "clean" industry, but in fact, a large number of organic and inorganic substances, including many toxic and harmful substances, are used in the semiconductor production process, which is more serious to the environment. If it is not controlled, it will produce greater environmental pollution.The semiconductor process requires extremely high cleanliness of the operating room, and fans are usually used to extract various types of exhaust gases that volatilize during the process. Exhaust emissions from the semiconductor industry have the characteristics of large exhaust volume and small emission concentration, mainly volatile.

Semiconductor IndustryVOCsExhaust gas mainly comesFrom lithography, development, etching and diffusion processesIn these processes, the surface of the wafer should be cleaned with an organic solution (such as isopropyl alcohol), and the waste gas generated by its volatilization is one of the sources of organic waste gas. At the same time, the photoresist (photoresist) used in photolithography, etching and other processes contains volatile organic solvents, such as butyl acetate, which also volatilizes into the atmosphere during wafer processing, which is another source of organic waste gas.

The semiconductor production process includes precision micro-electromechanical and integrated circuits, and the requirements for the cleanliness of the production environment are particularly strict, so the entire manufacturing process must be carried out under strictly controlled environmental conditions. With the process feature size (feature size) Rapid shrinking, clean room ambient air quality requirements are more stringent. For semiconductor processVOCThe monitoring of the following links: plant-wide environmental monitoring; Filter efficiency testing; In-process wafer handling box cleanliness testing; Main temperament testing in the factory; Process pollution identification, etc.

Here, Shenzhen Science and Technology Co., Ltd. recommend a model for everyone.VOCGas sensorPID-AH5， PID-AH5Sensors of the United KingdomAlphasenseThe company developed a photo ionization sensor specifically for the detectionVOCsGas sensor, this sensor is a simple plug-and-play sensor that can be used in a variety of different applications for thousands of volatile organic compounds (VOCS) Provide dynamic and reliable response. Designed for both diffusion and on-line pumping, the sensor offers excellent response times and clearance rates, and uses a light bulb with exceptional brightness and stability to reliably detect weakly volatile and difficult-to-detect compounds over extended periods of time.

The main performance of the PID-AH5 sensor is as follows:

Linear range:1ppb-40ppm(Isobutylene)

T90 response time:2s

Typical sensitivity:50mV/ppm

Bulb Energy:10.6ev

Power consumption:80mW-200mW（Depends on supply voltage）

Supply voltage:3.2-5.5VDC

Output signal:0.040-2.85V