1. What is ozone and ozone hazards.

Ozone is a trace gas in the earth's atmosphere. It is formed by the decomposition of oxygen molecules in the atmosphere by solar radiation into oxygen atoms, which are combined with the surrounding oxygen molecules, containing three oxygen atoms. More than 90% of the ozone in the atmosphere exists in the upper part of the atmosphere or stratosphere, 10 to 50 kilometers from the ground. This is the atmospheric ozone layer that needs human protection. There are still a small number of ozone molecules hovering near the ground, which can still have a certain effect on blocking ultraviolet rays.

When ozone reaches a certain concentration, it can make people breathe faster and chest tightness. If the concentration is further increased, it can cause pulse acceleration, fatigue, headache and dust dispersion. If you stay in such an environment for 1 hour, emphysema will occur and even death will occur. Long-term stay in the environment of serious ozone pollution, skin health may also have damage, but also may increase the risk of cancer. Ozone pollution also causes damage to the environment. For example, it will lead to plant leaf necrosis, shedding, harm to the ecological environment, resulting in crop production and so on.

2. Application of Ozone in Semiconductor Industry

In the past few years, the application of ozone in the semiconductor industry has received increasing attention, especially in wafer cleaning processes.

In the semiconductor industry, cleanliness is an absolute requirement. Even small traces of contaminants can lead to changes in the structure of the wafer surface area. From80Since the end of the decade, cleaning processes using ozone have been used in chip production. Interest continues to grow as modifications and new methods are developed. Each wafer processing step is a potential source of contamination, and each step has its own specific type of contamination. This means that an effective cleaning process includes several cleaning steps to remove all contaminants on the crystal. At the same time the industry requirement of "absolute cleanliness" extends to equipment (ozone generators, contact equipment), which means that no particles are produced and no metal, ion or organic pollutants. So in the semiconductor industry will be more or less volatile ozone gas into the air.

3.  How to monitor ozone gas

Here, Shenzhen Technology Co., Ltd. recommend an ozone sensor OC-B431, which has the characteristics of fast response, anti-interference, high resolution, good linearity and high sensitivity. The sensor is a four-electrode electrochemical sensor, which is different from the regular three-electrode electrochemical sensor, OX-B431 an auxiliary pole is added to compensate the zero current, so that the sensor has a more stable zero point. Here are some of the OX-B431 parameters:

Range: 0-20ppm

Resolution: 15ppb

Sensitivity:-225 ~-75nA/ppm

Overload: 50ppm

Size: φ32.3X16.5